Automatic Wafer Probing System

Features

• Wafer Size : 3" to 8" of Silicon, GaAs, etc.
• Wafer loading : up to 50ea (2 cassette)
• Travel Resolution : less than 0.25um
• R/F frequency : up to 110GHz for Network Analyzer, etc.
• Ultra-low loss : less than 0.25dB max.
• Chuck leakage plus noise : 1fA at non-thermal by patented FemtoGuarded Chuck
• Thermal chuck Temperature : -55'C to +200'C by patented MicroChamber

• DC parametric test : Probe card, Probe Needles, Connectors, etc.
  
• R/F test : Pyramid Probe Card, Patented Air Coplanar Probe, NIST verified ISS, Contact Substrate, WinCal Calibration Software, etc
• Operating Software : Windows NT
• Link to popular software : ICMS, SPECS, KTE, ICS, IC-CAP, SILVACO, SWORD, and all others
• Link to Testers: HP4155/56, HP4062, HP4071, Keithley S600, LTX, Teradyne, Advantest, etc.

• General electrical DC parametric test
• fA level low current measurement
• Low temperature measurement
• R/F test for S-parameter
• Noise Parameter
• Ft measurement
• mm Wave measurement